PRODUCTS for SEMICONDUCTOR INDUSTRY
WT-2000/WT-3000 Wafer Tester
Monitors defects and contamination both in the bulk and in the surface region of silicon wafers. It is a useful tool for incoming wafer inspection, quality control and process monitoring in the wafer and IC manufacturing processes.
SIRM-300 Bulk Microdefect Analyzer and LST Light Scattering Tomograph
Optical methods for bulk microdefect characterization and and denuded zone determination
DLS-83D Deep Level Spectrometer
Identification of impurities and determination of their concentration down to 109 atoms/cm3
Resistivity, implant dose and p/n type testers
Non-contact methods for determination bulk resitivity, sheet resistance and conductivity type (p or n) of the material
To request additional information, please contact us: semilab@semilab.hu