DLS-83D Deep Level Spectrometer


The deep level transient spectroscopy (DLTS) is the best technique for monitoring and characterizing deep levels caused by intentionally or unintentionally introduced impurities and defects in semiconductor materials and complete devices. It is an extremely versatile method for determining all parameters associated with deep traps including energy level, capture cross section and concentration distribution. It permits identification of the impurities and is capable of detecting contamination concentrations below 109 atoms/cm³.


The DLS-83D offers a fully automatic measurement mode as well as providing complete interpretation of the measured data, including impurity identification and concentration determination without any need for user interaction. 		Key features
  • Highest sensitivity (109atoms/cm³) for detection of trace level of contamination
  • Interfacing to a broad range of cryostats
  • Wide range of measurement modes:
        temperature scan
        frequency scan
        depth profiling
        C-V characterization
        capture cross section measurement
        optical injection
        constant capacitance feedback loop
        conductance transient measurements
        MOS interface state density distribution
  • controlled by digital and analog settings to allow real ease of operation
  • sample quality test by I-V, C-V
  • full computer control with extensive software support, complete library database for accurate contamination idetification

To request additional information, please contact us: semilab@semilab.hu