Non-contact Implant Dose Monitor

The Implant Dose Monitor has a non-contact 4-PP capabiliy. It provides measurement of implant dose -even ultra shallow implants- ,epi layer resistivity, doped poly sheet resistance and other applications typically measured via 4-point probe.
In-Line Measuring Tool:
WT-3000/JPV 		Bench-Top Mapping System:
WT-2000/JPV

To request additional information, please contact us: semilab@semilab.hu