WT-2000 /WT-3000 Wafer Tester

Monitors defects and contamination both in the bulk and in the surface region of silicon wafers. It is a useful tool for incoming wafer inspection, quality control and process monitoring in the wafer and IC manufacturing processes.
WT-3000 models WT-2000 models
in-line
dedicated contamination monitoring tools		 bench-top
multifunction wafer mapping tools
Multiple measurement techniques can be integrated into the same system.

Heavy metal contamination and crystal defect monitoring:
  • µ-PCD - carrier lifetime
  • Laser-SPV - diffusion length
  • Fe, Cr conentration mapping
  • Cu concentration measurement

    Oxide and interface characterization
  • Non-contact MOS-CV Tool

    • To request additional information, please contact us: semilab@semilab.hu