SERVICE MEASUREMENTS

SEMILAB provides service measurements on all available measuring systems at SEMILAB's site.

Send your samples to SEMILAB and you receive the complete test report including the description of the performed investigations, the measuring conditions, the measured results and the data evaluation. We can also offer sample preparations like contact deposition for the DLTS measurement, SiO2 or Si layer removal by appropriate etching etc.

    AVAILABLE MEASUREMENTS

    • Lifetime mapping
    • Diffusion length mapping
    • Fe concentration mapping
    • Epi layer characterization (lifetime and Fe mapping)
    • Surface potential mapping
    • Oxide charge mapping
    • Oxide characterization (Tox , Cox , Vsurf , Vs , Vox , Vfb , Vmb , Vth , Qtot , Qnet , Qit , Dit)
    • Resistivity mapping
    • SIRM measurement - complete characterization of bulk microdefects
    • DLTS measurement - identification, concentration and depth distribution of impurities

To request additional information, please contact us: semilab@semilab.hu